Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field

  title={Electromagnetic Two-Dimensional Scanner Using Radial Magnetic Field},
  author={Chang-Hyeon Ji and Moongoo Choi and S. Kim and Ki-Chang Song and Jong-Uk Bu and Hyo-Jin Nam},
  journal={Journal of Microelectromechanical Systems},
In this paper, we present the design, fabrication, and measurement results of a two-dimensional electromagnetic scanning micromirror actuated by radial magnetic field. The scanner is realized by combining a gimbaled single-crystal-silicon micromirror with a single turn electroplated metal coil, with a concentric permanent magnet assembly composed of two concentric permanent magnets and an iron yoke. The proposed scanner utilizes the radial magnetic field rather than using a lateral magnetic… CONTINUE READING
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