Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film


The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic… (More)
DOI: 10.1109/TUFFC.2011.1860

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