Electro-mechanical coupling in shear-mode FBAR with piezoelectric modulated thin film

Abstract

The electro-mechanical coupling and resonance characteristics of a piezoelectric modulated thin film bulk acoustic wave resonator (PMBAR) is described quantitatively. The derived 1-D analytical model is in agreement with 2-D finite element modeling (FEM). The modeling shows that a pure shear mode excitation can be achieved and that coupling of parasitic… (More)
DOI: 10.1109/TUFFC.2011.1860

4 Figures and Tables

Topics

  • Presentations referencing similar topics