Electro-magnetic sensing and actuation array on silicon substrate platforms

@article{AbuNimeh2010ElectromagneticSA,
  title={Electro-magnetic sensing and actuation array on silicon substrate platforms},
  author={Faisal T. Abu-Nimeh and Fathi M. Salem},
  journal={2010 IEEE Nanotechnology Materials and Devices Conference},
  year={2010},
  pages={119-122}
}
Electromagnetic arrays can be precisely constructed on silicon CMOS technology as a platform for collective non-contact sensing and manipulation of magnetic or magnetized particles of micron to nano scale. Such platforms become a tool to interact with nano scale particles on the silicon substrate and enable direct interface to measurement and computing… CONTINUE READING