Electrical transport properties of thick and thin Ta-doped SnO2 films

@article{Gao2022ElectricalTP,
  title={Electrical transport properties of thick and thin Ta-doped SnO2 films},
  author={Zonglong Gao and Zibo Wang and Dongmei Hou and Xin‐Dian Liu and Zhi-Qing Li},
  journal={Journal of Applied Physics},
  year={2022}
}
Ta-doped SnO2 films with high conductivity and high optical transparency have been successfully fabricated using rf-sputtering method and their electrical transport properties have been investigated. All films reveal degenerate semiconductor (metal) characteristics in electrical transport properties. For the thick films (t ∼ 1μm with t being the thickness) deposited in pure argon, the electron-phonon scattering alone cannot explain the temperature dependent behaviors of resistivity, the… 

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