Electrical properties of Bi2Mg2∕3Nb4∕3O7 (BMN) pyrochlore thin films deposited on Pt and Cu metal at low temperatures for embedded capacitor applications

@inproceedings{Xian2007ElectricalPO,
  title={Electrical properties of Bi2Mg2∕3Nb4∕3O7 (BMN) pyrochlore thin films deposited on Pt and Cu metal at low temperatures for embedded capacitor applications},
  author={Cheng-Ji Xian and Jong-hyun Park and Kyung-Chan Ahn and Soon-Gil Yoon and Jeong-won Lee and Woon-Chun Kim and Sung-Taek Lim and Seung-Hyun Sohn and Jin-Seok Moon and Hyung-Mi Jung and Seung Eun Lee and In-Hyung Lee and Yul-Kyo Chung and Mk Jeon and S. E. Woo},
  year={2007}
}
200-nm-thick BMN films were deposited on Pt∕TiO2∕SiO2∕Si and Cu∕Ti∕SiO2∕Si substrates at various temperatures by pulsed laser deposition. The dielectric constant and capacitance density of the films deposited on Pt and Cu electrodes show similar tendency with increasing deposition temperature. On the other hand, dielectric loss of the films deposited on Cu electrode varies from 0.7% to 1.3%, while dielectric loss of films on Pt constantly shows 0.2% even though the deposition temperature… CONTINUE READING

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