Electrical characterization of carbon nanofibers for on-chip interconnect applications

  title={Electrical characterization of carbon nanofibers for on-chip interconnect applications},
  author={Quoc Nam Ngo and Shoba Krishnan and A. Cassell and Yusuke Ominami and Jun Li and M. Meyyappan and C. Y. Yang},
  journal={5th IEEE Conference on Nanotechnology, 2005.},
  pages={431-434 vol. 1}
Recent process and reliability issues in state-of-the-art copper on-chip interconnects systems have spurred an interest in finding new materials to augment, or in some cases, replace copper as an interconnect material for future technology nodes. Carbon nanofiber (CNF) is one such candidate material for on-chip interconnect integration. Three main aspects of our research are discussed, controllable CNF synthesis, CNF-metal interface characterization, and development of new test structures and… CONTINUE READING
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