Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators

@article{Shao2014ElectricalCO,
  title={Electrical characterization of ALD-coated silicon dioxide micro-hemispherical shell resonators},
  author={Peng Shao and Vahid Tavassoli and Chang-shun Liu and Logan Sorenson and Farrokh Ayazi},
  journal={2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)},
  year={2014},
  pages={612-615}
}
This paper reports on electrical characterization of ALD-coated thermally-grown silicon dioxide micro-hemispherical shell resonators (μHSRs) with capacitive electrodes. A high aspect ratio silicon dioxide μHSR with a thickness of 2.6 μm and diameter of 910 μm, uniformly coated with 30 nm of platinum using ALD process, demonstrated Q of 19,100 at 19.17 kHz… CONTINUE READING