Electrical and plasma characteristics of 150 kHz band high-power burst inductively coupled plasma

@article{Shibata2017ElectricalAP,
  title={Electrical and plasma characteristics of 150 kHz band high-power burst inductively coupled plasma},
  author={Koui Shibata and Shujiro Konno and Koji Takahashi and Seiji Mukaigawa and Koichi Takaki and Ken Yukimura},
  journal={2017 IEEE 21st International Conference on Pulsed Power (PPC)},
  year={2017},
  pages={1-4}
}
Plasma source of an inductively coupled plasma (ICP) driven by high voltage burst pulse has been developed. A 200 ps wide burst of 157 kHz power supply was used to produce plasma with repetition rate of 1 Hz. The electrical and plasma parameters are obtained based on mutual induction circuit model by analyzing waveforms of the coil current and the voltage. The plasma density was also obtained using a double probe measurement. The results showed that electrical power into plasma was obtained as… CONTINUE READING

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