Electrical Contact Resistance Degradation of a Hot-Switched Simulated Metal MEMS Contact

  title={Electrical Contact Resistance Degradation of a Hot-Switched Simulated Metal MEMS Contact},
  author={D. J. Dickrell and M. T. Dugger},
  journal={IEEE Transactions on Components and Packaging Technologies},
Electrical contact resistance testing was performed by hot-switching a simulated gold-platinum metal microelectromechanical systems contact. The experimental objective was to determine the sensitivity of the contact resistance degradation to current level and environment. The contact resistance increased sharply after 100hot-switched cycles in air. Hot-switching at a reduced current and in nitrogen atmosphere curtailed contact resistance degradation by several orders of magnitude. The mechanism… CONTINUE READING
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