Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure

@inproceedings{Dhariwal2000ElectricFB,
  title={Electric field breakdown at micrometre separations in air and nitrogen at atmospheric pressure},
  author={Resham S Dhariwal and J. L. Ribeiro Torres and Marc Phillipe Yves Desmulliez},
  year={2000}
}
For efficient operation, micromotors and microactuators, such as those employed in microsystems, are required to operate with high electric fields at electrode separations of the order of micrometres. An apparatus was built to accurately measure the breakdown voltage for electrode spacings as low as 0.5 µm. Breakdown voltage measurements in air and nitrogen are presented and discussed for the gap range 0.5 to 15 µm. Energy dispersive analysis of X-rays (EDAX) confirms the transfer of material… CONTINUE READING

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