Electric directivity scanning using arrayed ultrasonic transmitter/receiver with parylene diaphragm

@article{Ono2008ElectricDS,
  title={Electric directivity scanning using arrayed ultrasonic transmitter/receiver with parylene diaphragm},
  author={Daiki Ono and Gou Kawai and Masahito Suzuki and Seiji Aoyagi and Kaoru Yamashita and Masanori Okuyama},
  journal={2008 World Automation Congress},
  year={2008},
  pages={1-6}
}
This paper reports the development of an arrayed device, which can act as both transmitter and receiver for ultrasonic pulses in the air. The device is composed of micromachined capacitive structures with parylene diaphragms, each of which can generate large sound pressure and realize high sensitivity based on the non-brittle and flexible characteristics of… CONTINUE READING