Efficient optical elements to generate intensity weighted spot arrays: design and fabrication.

Abstract

We report on the design and fabrication of fully 2-D surface relief diffraction elements that can split a single collimated beam into many beams in an arbitrary intensity distribution. These splitters were designed by computer using simulated annealing, and made into phase gratings by electron-beam lithography followed by plasma etching into quartz glass… (More)
DOI: 10.1364/AO.30.002685

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