Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems

@article{Tang2015EfficientLD,
  title={Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems},
  author={Chin-Khai Tang and Ming-Shing Su and Yi-Chang Lu},
  journal={Journal of Micro/Nanolithography, MEMS, and MOEMS},
  year={2015},
  volume={14}
}
A lossless electron-beam layout (EBL) data compression algorithm, LineDiff Entropy v2.0, and its low-complexity, high-performance hardware decoder for multiple electron-beam direct-write lithography systems are proposed. The algorithm compares consecutive data scanlines and encodes the data based on the change/no-change of pixel values and the lengths of pixel sequences. Then, the compaction steps of data omission, merging, and encoding of consecutive long identical scanlines are applied… CONTINUE READING

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