Efficient encoding algorithms for computer-aided design of diffractive optical elements by the use of electron-beam fabrication.

Abstract

One of the general requirements of a computer-aided design system is the existence of efficient (in data size and running time) algorithms that are generally reliable for the broadest range of design instances. The restricted data formats of the electron-beam machines impose difficulties in developing algorithms for the design of diffractive optical… (More)
DOI: 10.1364/AO.34.002522

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Cite this paper

@article{Fan1995EfficientEA, title={Efficient encoding algorithms for computer-aided design of diffractive optical elements by the use of electron-beam fabrication.}, author={J. Fan and D. Zaleta and Kirstie Urquhart and S. H. Lee}, journal={Applied optics}, year={1995}, volume={34 14}, pages={2522-33} }