Efficient Planar-Integrated Free-Space Optical Interconnects Fabricated by a Combination of Binary and Analog Lithography

Abstract

Design, fabrication, and experimental testing of an integrated microoptical module for interconnection are reported. The systems integration is based on the concept of planar-integrated free-space optics. The module combines diffractive-reflective and refractive microoptics. The diffractive elements were fabricated by binary lithography and reactive ion… (More)

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