Effects of substrate temperature on electrical and structural properties of copper thin films

@article{Chan2006EffectsOS,
  title={Effects of substrate temperature on electrical and structural properties of copper thin films},
  author={Kah-Yoong Chan and Teck-Yong Tou and Bee-San Teo},
  journal={Microelectronics Journal},
  year={2006},
  volume={37},
  pages={930-937}
}
This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500 nm were deposited from Cu target in argon ambient gas pressure of 3.6mTorr at different substrate temperatures ranging from room temperature to 250 1C. The… CONTINUE READING