Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc

@inproceedings{Tay2005EffectsOS,
  title={Effects of substrate bias and growth temperature on properties of aluminium oxide thin films by using filtered cathodic vacuum arc},
  author={B. K. Tay and Zhiwei Zhao and Chang Q Sun},
  year={2005}
}
Two sets of aluminium oxide thin films were deposited using off-plane filtered cathodic vacuum arc (FCVA) at the working pressure of 6 10 4 Torr under various substrate biases ( 60 to 140 V) and substrate temperatures (120–600 8C), respectively. Optical and mechanical properties, such as refractive index, residual stress, hardness and Young’s modulus, of… CONTINUE READING