Effects of pressure on suspended micromechanical membrane arrays

  title={Effects of pressure on suspended micromechanical membrane arrays},
  author={Andreas Naesby and Sepideh Naserbakht and Aur{\'e}lien Dantan},
  journal={arXiv: Mesoscale and Nanoscale Physics},
The effects of pressure on micromechanical air-filled cavities made by a pair of suspended, parallel silicon nitride membranes are investigated in the free molecular and quasi-molecular regimes. Variations of the fundamental drummode mechanical resonant frequencies and damping with air pressure are determined by means of optical interferometry. A kinetic damping linear friction force and a positive resonant frequency shift due to the compression of the fluid between the membranes are observed… 

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