Effects of deposition temperature on the structural, optical, and electrical properties of hydrogenated of Ga-doped ZnO film

@article{Tsai2015EffectsOD,
  title={Effects of deposition temperature on the structural, optical, and electrical properties of hydrogenated of Ga-doped ZnO film},
  author={J. J. P. Tsai and Neng-Fu Shih and Rong-Hwei Yeh},
  journal={2015 20th Microoptics Conference (MOC)},
  year={2015},
  pages={1-2}
}
GZO thin films were prepared on a glass substrate by dc magnetron sputtering with hydrogen at various deposition temperatures (T<sub>d</sub>). As a result of the incorporation of hydrogen atoms that acted as shallow donors, the carrier concentration of each film initially increased when T<sub>d</sub> increased from 25 °C to 175 °C but then decreased as T… CONTINUE READING