Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates

@article{Wang2012EffectsOD,
  title={Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates},
  author={Yan Wang and Kiyotaka Wasa and Shu-Yi Zhang},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
  year={2012},
  volume={59},
  pages={1613-1617}
}
(1120) ZnO films with the c-axis lying in the plane deposited on R-sapphire substrates by RF magnetron sputtering are studied. The focusing investigation is the effect of substrate positions in the sputtering on structural and acoustic characteristics of the ZnO films. The crystallographic characteristics of the films are characterized by X-ray diffraction analysis. It is found that the crystalline orientation of ZnO films varies with the variation of substrate position deviated from the normal… CONTINUE READING

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