• Materials Science
  • Published 2015

Effects of Temperature on Preferred Orientation of Diamond Films at High Gas Pressure

@inproceedings{Xueqi2015EffectsOT,
  title={Effects of Temperature on Preferred Orientation of Diamond Films at High Gas Pressure},
  author={Zhou Xue-qi},
  year={2015}
}
Polycrystalline diamond films were obtained at different temperatures in a newly developed cylindrical MPCVD reactor,using H2-CH4 as source gas.Gas pressure,input microwave power and methane concentrations were fixed at 30 kPa,6kW and 2%,respectively.Surface morphologies,phases and preferred orientation of the diamond films were characterized by scanning electron microscopy and X-ray diffraction technologies.The results show that the temperature of substrate has a significant effect on… CONTINUE READING