Effects of Radiation on MEMS

@inproceedings{Shea2011EffectsOR,
  title={Effects of Radiation on MEMS},
  author={Herbert R Shea},
  year={2011}
}
The sensitivity of MEMS devices to radiation is reviewed, with an emphasis on radiation levels representative of space missions. While silicon and metals generally do not show mechanical degradation at the radiation levels encountered in most missions, MEMS devices have been reported to fail at doses of as few krad, corresponding to less than one year in most orbits. Radiation sensitivity is linked primarily to the impact on device operation of radiation-induced trapped charge in dielectrics… CONTINUE READING

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References

Publications referenced by this paper.
Showing 1-10 of 44 references

Response of piezoresistive MEMS accelerometers and pressure transducers to high gamma dose

  • K. E. Holbert, J. A. Nessel, S. S. McCready, A. S. Heger, T. H. Harlow
  • IEEE Transactions on Nuclear Science, Vol 50, Iss…
  • 2003
Highly Influential
5 Excerpts

Gamma-ray radiation effects on RF MEMS switches

  • R. N. Schwartz
  • IEEE Microelectronics Reliability and…
  • 2000
Highly Influential
13 Excerpts

The effects of radiation on MEMS accelerometers

  • A. R. Knudson, S. Buchner, +4 authors D. L. Knies
  • IEEE Trans. Nucl. Sci. 43, 3122-3126.
  • 1996
Highly Influential
17 Excerpts

Total dose effects on micromechanical systems (MEMS): accelerometers

  • C. I. Lee, A. H. Johnston, W. C. Tang, C. E. Barnes
  • IEEE Trans. Nucl. Sci. 43 3127-3132
  • 1996
Highly Influential
7 Excerpts

Total dose degradation of MEMS optical mirrors

  • T. F. Miyahira
  • IEEE Transactions on Nuclear Science,
  • 2003
Highly Influential
4 Excerpts

Radiation response of a MEMS accelerometers: an electrostatic force

  • L. D. Edmonds, G. M. Swift, C. I. Lee
  • IEEE Trans. Nucl. Sci. 45 2779-2788
  • 1998
Highly Influential
4 Excerpts

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