• Corpus ID: 6602266

Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

@article{Zamek2011EffectsOL,
  title={Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings},
  author={Steve Zamek and Mercedeh Khajavikhan and D. T. H. Tan and Maurice Ayache and Boris Slutsky and Yeshaiahu Fainman},
  journal={arXiv: Optics},
  year={2011}
}
We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details. 

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References

SHOWING 1-7 OF 7 REFERENCES
Effect of fabrication errors in channel waveguide Bragg gratings.
TLDR
The spectral performances of nonideal rectangular Bragg gratings, integrated in a rib waveguide, are analyzed by a multilayer approach based on the effective-index method and a novel analytical approach that extends coupled-mode theory to the analysis of real gratings is presented.
Fabrication of First-Order Gratings for GaAs/AlGaAs LD's by EB Lithography
High-precision first-order gratings, 110 nm pitch, for GaAs/AlGaAs LD's were successfully fabricated using EB lithography. The field stitching error of EB lithography caused by height difference
The effect of stitching errors on the spectral characteristics of DFB lasers fabricated using electron beam lithography
Field stitching errors and their effect on the single-mode characteristics of distributed feedback (DFB) lasers fabricated using electron beam lithography were investigated. The stitching errors are
Compact chip-scale filter based on curved waveguide Bragg gratings.
We propose a method for miniaturization of filters based on curved waveguide Bragg gratings, so that long structures can be packed into a small area on a chip. This eliminates the stitching errors
Fiber Bragg Gratings
Time-Harmonic Electromagnetic Fields
Foreword to the Revised Edition. Preface. Fundamental Concepts. Introduction to Waves. Some Theorems and Concepts. Plane Wave Functions. Cylindrical Wave Functions. Spherical Wave Functions.
Optical electronics.