• Corpus ID: 6602266

Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings

  title={Effects of Lithographic Stitching Errors on the Performance of Waveguide Bragg Gratings},
  author={Steve Zamek and Mercedeh Khajavikhan and D. T. H. Tan and Maurice Ayache and Boris Slutsky and Yeshaiahu Fainman},
  journal={arXiv: Optics},
We investigate the performance of waveguide Bragg gratings as a function of imperfections introduced in the fabrication process. Effects of stitching errors introduced in the electron-beam and UV-lithography are discussed in details. 

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