Effects of Complex Structured Anodic Oxide Dielectric Layer Grown in Pore Matrix for Aluminum Capacitor.

Abstract

Anodization of aluminum is generally divided up into two types of anodic aluminum oxide structures depending on electrolyte type. In this study, an anodization process was carried out in two steps to obtain high dielectric strength and break down voltage. In the first step, evaporated high purity Al on Si wafer was anodized in oxalic acidic aqueous solution… (More)

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Cite this paper

@article{Shin2015EffectsOC, title={Effects of Complex Structured Anodic Oxide Dielectric Layer Grown in Pore Matrix for Aluminum Capacitor.}, author={Jin-Ha Shin and Sook Young Yun and Chang Hyoung Lee and Hwa-Sun Park and Su-Jeong Suh}, journal={Journal of nanoscience and nanotechnology}, year={2015}, volume={15 11}, pages={8901-6} }