Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices

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@inproceedings{SuarezSegovia2015EffectiveWF, title={Effective work function engineering by sacrificial lanthanum diffusion on HfON-based 14 nm NFET devices}, author={Carlos Suarez-Segovia and Charles Leroux and Florian Domengie and Karen Dabertrand and Vincent Joseph and Giovanni Romano and Pierre Caubet and Stephane Zoll and Olivier Weber and G{\'e}rard Ghibaudo and Gilles Reimbold and Michel Haond}, booktitle={ESSDERC}, year={2015} }