Effective nanometer airgap of NEMS devices using negative capacitance of ferroelectric materials.

@article{Masuduzzaman2014EffectiveNA,
  title={Effective nanometer airgap of NEMS devices using negative capacitance of ferroelectric materials.},
  author={Muhammad Masuduzzaman and Muhammad Ashraful Alam},
  journal={Nano letters},
  year={2014},
  volume={14 6},
  pages={3160-5}
}
Nanoelectromechnical system (NEMS) is seen as one of the most promising candidates for next generation extreme low power electronics that can operate as a versatile switch/memory/sensor/display element. One of the main challenges toward this goal lies in the fabrication difficulties of ultrascaled NEMS required for high density integrated circuits. It is generally understood that fabricating and operating a NEMS with an airgap below a few nanometer will be extremely challenging due to surface… CONTINUE READING
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Mirasol ( R ) − MEMSbased Direct View Re fl ective Display Technology

I. Bita, A. Govil, E. Gusev
Handbook of Visual Display Technology

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