Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning

@article{Wu2016EffectiveTA,
  title={Effective Tilting Angles for a Dual Probes AFM System to Achieve High-Precision Scanning},
  author={Jim-Wei Wu and Yi-Ting Lin and Yu-Ting Lo and Wei-Chih Liu and Kuang-Yao Chang and Dawei Liu and Li-Chen Fu},
  journal={IEEE/ASME Transactions on Mechatronics},
  year={2016},
  volume={21},
  pages={2512-2521}
}
Because of the everlasting promotion of micro/nanofabrication techniques, the measurement of the feature contour of micro/nanofabricated structures becomes an important issue. Atomic force microscopy (AFM) is a high accuracy measurement instrument that has been frequently used in measuring of micro/nanofabricated structures. However, most conventional AFM systems use a single probe with a monotonic tilting angle to scan all kinds of sample profiles. This type of AFM design easily suffers from… CONTINUE READING