Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis

  title={Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis},
  author={Yong Zhu and Horacio Dante Espinosa},
  journal={Journal of Micromechanics and Microengineering},
Three-dimensional multiphysics finite element analysis (FEA) was performed to investigate the reliability of RF MEMS switches at various operational temperatures. The investigated MEMS capacitive switch consists of a freestanding metal membrane actuated by a bottom electrode coated by a dielectric film. Coupled-field simulations between thermal, structural and electrostatic domains were performed. The simulations show that temperature significantly changes both the membrane stress state and out… Expand
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  • X. Lafontan, C. Le Touze, +6 authors S. Rigo
  • Engineering, Materials Science
  • Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS
  • 2002
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