Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis

@article{Zhu2004EffectOT,
  title={Effect of temperature on capacitive RF MEMS switch performance—a coupled-field analysis},
  author={Yong Zhu and Horacio Dante Espinosa},
  journal={Journal of Micromechanics and Microengineering},
  year={2004},
  volume={14},
  pages={1270-1279}
}
Three-dimensional multiphysics finite element analysis (FEA) was performed to investigate the reliability of RF MEMS switches at various operational temperatures. The investigated MEMS capacitive switch consists of a freestanding metal membrane actuated by a bottom electrode coated by a dielectric film. Coupled-field simulations between thermal, structural and electrostatic domains were performed. The simulations show that temperature significantly changes both the membrane stress state and out… Expand
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