Effect of surface morphology on the sputtering yields. II. Ion sputtering from rippled surfaces

@inproceedings{Makeev2004EffectOS,
  title={Effect of surface morphology on the sputtering yields. II. Ion sputtering from rippled surfaces},
  author={Maxim A. Makeev and Albert-L{\'a}szl{\'o} Barab{\'a}si},
  year={2004}
}
Abstract Off-normal ion bombardment of solid targets with energetic particles often leads to development of periodically modulated structures on the surfaces of eroded materials. Ion-induced surface roughening, in its turn, causes sputtering yield changes. We report on a comprehensive theoretical study of the effect of rippled surface morphology on the sputtering yields. The yield is computed as a function of the parameters characterizing the surface morphology and the incident ion beam, using… CONTINUE READING

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