Effect of patterned magnetic shields on high-frequency integrated inductors

  title={Effect of patterned magnetic shields on high-frequency integrated inductors},
  author={A Crawford and S. X. Wang},
  journal={IEEE Transactions on Magnetics},
Understanding the losses in magnetic integrated inductors is essential for attaining optimal performance. Integrated inductors with thick magnetic shield (MS) with eddy current inhibiting slots were fabricated to understand the losses due to the MS, patterning, and eddy currents. An increase in the quality factor was measured for inductors with patterned magnetic shields. We further measured a) only a partial inhibition of eddy currents in films, and b) an increased in the expected frequency… CONTINUE READING
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