Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers.


In this paper, we investigate the effects of non-ideal clamping shapes on the dynamic behavior of silicon nanocantilevers. We fabricated silicon nanocantilevers using silicon on insulator (SOI) wafers by employing stepper ultraviolet (UV) lithography, which permits a resolution of under 100 nm. The nanocantilevers were driven by electrostatic force inside a… (More)
DOI: 10.1088/0957-4484/22/24/245501