Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO

@inproceedings{Strojny1996EffectOF,
  title={Effect of film thickness and substrate surface treatment on substrate deformation: DLC on MgO},
  author={A. Strojny and Erica Thea Lilleodden and Geng Wang and J. V. Sivertsen and William W. Gerberich},
  year={1996}
}
Diamond-Like Carbon films with thicknesses controlled in the 10 to 100 nm range were sputter-deposited on single crystals of MgO. The substrates were prepared with varying roughness from 5 to 50 nm and varying surface dislocation densities from 100 to 2,000 disl./{micro}m{sup 2}. Mechanical properties of the film and film-substrate interactions were investigated with an atomic force microscope retrofitted with a diamond indenter. The load bearing capacity of the substrate increased with… CONTINUE READING