Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning.

@article{Kang2014EffectOD,
  title={Effect of dissolved gases in water on acoustic cavitation and bubble growth rate in 0.83 MHz megasonic of interest to wafer cleaning.},
  author={Bong-Kyun Kang and Min-su Kim and Jin-Goo Park},
  journal={Ultrasonics sonochemistry},
  year={2014},
  volume={21 4},
  pages={1496-503}
}
Changes in the cavitation intensity of gases dissolved in water, including H2, N2, and Ar, have been established in studies of acoustic bubble growth rates under ultrasonic fields. Variations in the acoustic properties of dissolved gases in water affect the cavitation intensity at a high frequency (0.83 MHz) due to changes in the rectified diffusion and… CONTINUE READING