Effect of Gate Metal Electrode on Chemical Bonding State in Metal/Pr-Oxide/Ge Gate Stack Structure

Abstract

We investigated the effect of the oxidation-reduction character of metal electrode on the chemical bonding state in metal/Pr-oxide/Ge gate stack structure. The binding energy of the Pr-oxide peak increases with the formation of a metal electrode with the strong reduction character, indicating the change in the valence state of Pr from tetravalent to… (More)

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