Effect of Energy Contamination on the P-Channel Transistor Characteristics


The Nwell and Pwell retrograde implants are high-energy implants requiring double charge implants for some cases. The energy contamination for double charge implant poses strict control on implanter performance, with critical control on the vacuum levels on the implanter. Even with well-controlled ultra high vacuum, the energy contamination is inevitable… (More)


9 Figures and Tables