Effect of Ce doping on the growth of ZnO thin films

@inproceedings{Morinaga1997EffectOC,
  title={Effect of Ce doping on the growth of ZnO thin films},
  author={Yasunori Morinaga and Keijiro Sakuragi and Norifumi Fujimura and Taichiro Ito},
  year={1997}
}
Recently, ZnO films doped by trivalent elements have attracted much attention for use in transparent conductive films. The impurity doping to control the carrier concentration generally causes degradation of crystallinity and preferred orientation which leads to the deterioration of electrical characteristics. In this paper, the effects of various doping trivalent elements on the growth process and change in carrier concentration in thin films are discussed. We find that the deteriorated… CONTINUE READING

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