Edge smoothness enhancement in DMD scanning lithography system based on a wobulation technique.


The resolution of digital micro-mirror device (DMD) scanning lithography is limited in the transverse direction (the scanning direction is vertical) as a result of the compacted size of the DMD micro-mirror and the low magnification of the projection lens. Above-stated restrictions lead to an unsatisfactory saw-tooth edge (size ~one DMD pixel) after the… (More)
DOI: 10.1364/OE.25.021958


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