EUV Engineering Test Stand

Abstract

The Engineering Test Stand (ETS) is an EUV laboratory lithography tool. The purpose of the ETS is to demonstrate EUV full-field imaging and provide data required to support production-tool development. The ETS is configured to separate the !maging system and stages from the illumination system. Environmental conditions can be controlled independently in the… (More)

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Cite this paper

@inproceedings{Stand2000EUVET, title={EUV Engineering Test Stand}, author={Stand and D. A. Tichenor and Glenn D. Kubiak and William C. Replogle and Leonard E. Klebanoff and J. B. Wronosky and Linda Hale and H. N. Chapman and R. M. Hudyma and John B. Wronoskyb and Layton C. Hale and Henry N. Chapmanc and J. S. Taylor and James A. Folta and Russell M. Hudyma}, year={2000} }