ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors

@article{Sangameswaran2008ESDRI,
  title={ESD reliability issues in microelectromechanical systems (MEMS): A case study on micromirrors},
  author={Sandeep Sangameswaran and Jeroen de Coster and Dimitri Linten and Mirko Scholz and Steven Thijs and Luc Haspeslagh and Ann Witvrouw and Chris Van Hoof and Guido Groeseneken and Ingrid De Wolf},
  journal={EOS/ESD 2008 - 2008 30th Electrical Overstress/Electrostatic Discharge Symposium},
  year={2008},
  pages={249-257}
}
For the first time a study of electrostatically actuated torsional micromirrors under ESD stress is presented. Together with on-wafer ESD measurements their electrical and mechanical behavior under ESD stress is explained. HBM and MM measurements have been performed and their relevance in calculating the ESD failure level of the micromirrors is compared and discussed in detail. It is demonstrated that these optical MEMS devices have a high sensitivity to ESD and that they need ESD protection. 

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