Corpus ID: 135949584

EFFECTS OF ELECTRODE CONFIGURATIONS ON UNIFORMITY OF Cu/C:H FILMS PREPARED BY ECR-MOCVD COUPLED WITH A PERIODIC DC BIAS

@inproceedings{Jeon2004EFFECTSOE,
  title={EFFECTS OF ELECTRODE CONFIGURATIONS ON UNIFORMITY OF Cu/C:H FILMS PREPARED BY ECR-MOCVD COUPLED WITH A PERIODIC DC BIAS},
  author={B. Jeon and Sanghoon Myung and D. Byun and J. Lee},
  year={2004}
}