EELS log-ratio technique for specimen-thickness measurement in the TEM.

  title={EELS log-ratio technique for specimen-thickness measurement in the TEM.},
  author={T Malis and S. B. Chew Cheng and Ray F. Egerton},
  journal={Journal of electron microscopy technique},
  volume={8 2},
We discuss measurement of the local thickness t of a transmission microscope specimen from the log-ratio formula t = lambda ln (It/I0) where It and I0 are the total and zero-loss areas under the electron-energy loss spectrum. We have measured the total inelastic mean free path lambda in 11 materials of varying atomic number Z and have parameterized the results in the form lambda = 106F (E0/Em)/ln (2 beta E0/Em) where F = (1 + E0/1,022)/(1 + E0/511)2, the incident energy E0 is in keV, the… CONTINUE READING


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