E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives

  title={E-Beam Photoresist and Carbon Nanotubes as Biomimetic Dry Adhesives},
  author={Y. -C. Tsai and W.-P. Shih and Y. Wang and L Huang and P.-J. Shih},
  journal={19th IEEE International Conference on Micro Electro Mechanical Systems},
This paper presents the fabrication and characterization of nano-fibrils mimicking gecko foot-hairs for enhanced dry adhesion. High contact area ratio of the polymer and carbon nanotube fibrils is achieved, respectively, using e-beam lithography and chemical vapor deposition. The adhesion forces from gecko foot-hairs and the artificial fibrils are measured with a customized AFM tip to evaluate the effects of different materials and surface density. With the water-vapor assisted deposition, the… CONTINUE READING


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