Dynamics of an ultrasonic transducer used for wire bonding

  title={Dynamics of an ultrasonic transducer used for wire bonding},
  author={S. W. Or and H. L. W. Chan and V. C. Lo and C. W. Yuen},
  journal={IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control},
The vibration displacement distributions along a transducer used in ultrasonic wire bonding were measured using a heterodyne interferometer, and many nodes and anti-nodes were found. A mechanical finite element method (FEM) was used to compute the resonant frequencies and vibration mode shapes. The displacement distributions of the dominant 2nd axial mode agreed well with the measured values. Undesirable nonaxial modes, including the higher order flexural and torsional modes, also were excited… CONTINUE READING
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