Dynamical analysis and improvement of velocity for a 3 DOF precise inchworm mechanism

Abstract

In this paper, we describe the dynamical analysis and improvement of velocity for a precise inchworm mechanism with 3 DOF. This mechanism is composed of 4 piezoelectric actuators and pair of electromagnets and moves like an inchworm with less than a 10 nm resolution. We calculate the dynamical relationship between 3 DOF motion and 4 piezoelectric… (More)
DOI: 10.1109/IROS.2010.5650161

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