• DOI:10.1063/1.5018865
• Corpus ID: 3411800

Dynamic metasurface lens based on MEMS technology

@inproceedings{Roy2017DynamicML,
  title={Dynamic metasurface lens based on MEMS technology},
  author={Tapashree Roy and Shuyan Zhang and Il Woong Jung and Mariano Troccoli and Federico Capasso and Daniel L{\'o}pez},
  year={2017}
}

• T. Roy, Shuyan Zhang, +3 authors D. López
• Published 11 December 2017
• Engineering

In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis incident light and thus correct for aberrations such as coma. We show that for low angular displacements, the integrated lens-on-MEMS system does not affect the mechanical performance of the MEMS actuators and preserves the focused beam profile as well as the measured full width at half maximum. We envision a new class of flat optical devices with active control provided by the combination of metasurfaces and MEMS for a wide range of applications, such as miniaturized MEMS-based microscope systems, LIDAR scanners, a...