Dynamic metasurface lens based on MEMS technology
@inproceedings{Roy2017DynamicML, title={Dynamic metasurface lens based on MEMS technology}, author={Tapashree Roy and Shuyan Zhang and Il Woong Jung and Mariano Troccoli and Federico Capasso and Daniel L{\'o}pez}, year={2017} }
In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis…
117 Citations
MEMS-actuated metasurface Alvarez lens
- EngineeringMicrosystems & nanoengineering
- 2020
The MEMS Alvarez metalens has a robust design that can potentially generate a much larger tuning range without substantially increasing the device volume or energy consumption, making it desirable for a wide range of imaging and display applications.
Mechanically tunable focusing metamirror in the visible.
- PhysicsOptics express
- 2019
The first reflection type, tunable metalens (i.e., metamirror) operating in the visible regime (670 nm), is designed and it is shown that the focal length can be continuously adjusted by up to 45% with a 0% to 20% lateral stretching of the substrate, while maintaining diffraction-limited focusing and high focusing efficiency.
MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages.
- EngineeringOptics letters
- 2022
Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components that cannot be integrated on-chip and have slow actuation…
Metalens-Based Miniaturized Optical Systems
- PhysicsMicromachines
- 2019
A brief overview of the most recent studies on metalenses and their applications with a specific focus on miniaturized optical imaging and sensing systems and approaches for overcoming technical challenges in the bio-optics field.
A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning
- Engineering
- 2020
Confocal microscopes and two-photon microscopes are powerful tools for early cancer diagnosis because of their high-resolution 3D imaging capability, but applying them for clinical use in internal…
A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning.
- EngineeringOptics express
- 2020
A compact MEMS lens scanner that has the potential to overcome the lack of axially tunable lens modules with small size, high image quality and large tuning range is reported.
Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
- EngineeringMicromachines
- 2019
Recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed.
Temporal color mixing and dynamic beam shaping with silicon metasurfaces
- PhysicsScience
- 2019
This work can realize metasurfaces with fast (>105 hertz), electrically tunable pixels that offer complete (0- to 2π) phase control and large amplitude modulation of scattered waves through the microelectromechanical movement of silicon antenna arrays created in standard silicon-on-insulator technology.
Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication
- Engineering, PhysicsScientific reports
- 2022
Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we…
Large-area metasurface on CMOS-compatible fabrication platform: driving flat optics from lab to fab
- Physics
- 2020
Abstract A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional devices in ultrathin form. Various metasurface-based optical devices – coined as flat…
References
SHOWING 1-10 OF 28 REFERENCES
Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging
- PhysicsScience
- 2016
The results firmly establish that metalenses can have widespread applications in laser-based microscopy, imaging, and spectroscopy, with image qualities comparable to a state-of-the-art commercial objective.
Flat optics with designer metasurfaces.
- PhysicsNature materials
- 2014
This Review focuses on recent developments on flat, ultrathin optical components dubbed 'metasurfaces' that produce abrupt changes over the scale of the free-space wavelength in the phase, amplitude and/or polarization of a light beam.
Flat Optics: Controlling Wavefronts With Optical Antenna Metasurfaces
- PhysicsIEEE Journal of Selected Topics in Quantum Electronics
- 2013
Conventional optical components rely on the propagation effect to control the phase and polarization of light beams. One can instead exploit abrupt phase and polarization changes associated with…
Miniaturized probe using 2 axis MEMS scanner for endoscopic multiphoton excitation microscopy
- EngineeringSPIE BiOS
- 2008
The practical limitation of in vivo multiphoton excitation microscopy (MPM) is the lack of a compact and flexible probe. Most MPM depends on the bench-top microscope, which prohibits expansion of in…
2-D MEMS scanner for handheld multispectral confocal microscopes
- Engineering2012 International Conference on Optical MEMS and Nanophotonics
- 2012
We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated…
Optical MEMS for Lightwave Communication
- PhysicsJournal of Lightwave Technology
- 2006
The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks.…
Active Phase Transition via Loss Engineering in a Terahertz MEMS Metamaterial
- PhysicsAdvanced materials
- 2017
This work theoretically and experimentally demonstrate an active phase transition in a micro-electromechanical system-based metadevice where both the phase response and the dispersion of the metamaterial cavity are dynamically tailored.
High‐Efficiency Dielectric Huygens’ Surfaces
- Physics
- 2015
Optical metasurfaces have developed as a breakthrough concept for advanced wave‐front engineering enabled by subwavelength resonant nanostructures. However, reflection and/or absorption losses as…
Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces.
- PhysicsNano letters
- 2012
The concept of optical phase discontinuities is applied to the design and demonstration of aberration-free planar lenses and axicons, comprising a phased array of ultrathin subwavelength-spaced…
Miniature in vivo MEMS-based line-scanned dual-axis confocal microscope for point-of-care pathology.
- MedicineBiomedical optics express
- 2016
A miniature line-scanned (LS) dual-axis confocal (DAC) microscope, with a 12-mm diameter distal tip, has been developed for clinical point-of-care pathology and developed a method to actively align the illumination and collection beams in a DAC microscope through the use of a pair of rotatable alignment mirrors.