Dynamic metasurface lens based on MEMS technology

  title={Dynamic metasurface lens based on MEMS technology},
  author={Tapashree Roy and Shuyan Zhang and Il Woong Jung and Mariano Troccoli and Federico Capasso and Daniel L{\'o}pez},
In the recent years, metasurfaces, being flat and lightweight, have been designed to replace bulky optical components with various functions. We demonstrate a monolithic Micro-Electro-Mechanical System (MEMS) integrated with a metasurface-based flat lens that focuses light in the mid-infrared spectrum. A two-dimensional scanning MEMS platform controls the angle of the lens along two orthogonal axes by ±9°, thus enabling dynamic beam steering. The device could be used to compensate for off-axis… 

Figures from this paper

MEMS-actuated metasurface Alvarez lens

The MEMS Alvarez metalens has a robust design that can potentially generate a much larger tuning range without substantially increasing the device volume or energy consumption, making it desirable for a wide range of imaging and display applications.

Metalens-Based Miniaturized Optical Systems

A brief overview of the most recent studies on metalenses and their applications with a specific focus on miniaturized optical imaging and sensing systems and approaches for overcoming technical challenges in the bio-optics field.

A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning.

A compact MEMS lens scanner that has the potential to overcome the lack of axially tunable lens modules with small size, high image quality and large tuning range is reported.

Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens

Recent advances in MEMS metasurface applications are reviewed and categorized based on the tuning mechanisms, operation band and tuning speed.

Temporal color mixing and dynamic beam shaping with silicon metasurfaces

This work can realize metasurfaces with fast (>105 hertz), electrically tunable pixels that offer complete (0- to 2π) phase control and large amplitude modulation of scattered waves through the microelectromechanical movement of silicon antenna arrays created in standard silicon-on-insulator technology.

Millimeter-scale focal length tuning with MEMS-integrated meta-optics employing high-throughput fabrication

Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we

Large-area metasurface on CMOS-compatible fabrication platform: driving flat optics from lab to fab

Abstract A metasurface is a layer of subwavelength-scale nanostructures that can be used to design functional devices in ultrathin form. Various metasurface-based optical devices – coined as flat

Optical Metasurfaces: Evolving from Passive to Adaptive

Optical metasurfaces are nanoengineered architectures aiming at the functional control of light propagation. In recent years, the performance of metasurfaces has been significantly improved and with

Active optical metasurfaces: comprehensive review on physics, mechanisms, and prospective applications

Optical metasurfaces with subwavelength thickness hold considerable promise for future advances in fundamental optics and novel optical applications due to their unprecedented ability to control the

Progress of micro-nano fabrication technologies for optical metasurfaces

The principles, characteristics and latest developments for micro-nano fabrication of metasurfaces in recent years were summarized, including small-area direct writing methods, large-area template transfer methods, and some emerging fabrication methods.



Active Multifunctional Microelectromechanical System Metadevices: Applications in Polarization Control, Wavefront Deflection, and Holograms

Metasurfaces have provided a novel route to control the local phase of electromagnetic radiation through subwavelength scatterers where the properties of each element remain passive. A passive

Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging

The results firmly establish that metalenses can have widespread applications in laser-based microscopy, imaging, and spectroscopy, with image qualities comparable to a state-of-the-art commercial objective.

Flat optics with designer metasurfaces.

This Review focuses on recent developments on flat, ultrathin optical components dubbed 'metasurfaces' that produce abrupt changes over the scale of the free-space wavelength in the phase, amplitude and/or polarization of a light beam.

Flat Optics: Controlling Wavefronts With Optical Antenna Metasurfaces

  • N. YuF. Capasso
  • Physics
    IEEE Journal of Selected Topics in Quantum Electronics
  • 2013
Conventional optical components rely on the propagation effect to control the phase and polarization of light beams. One can instead exploit abrupt phase and polarization changes associated with

Miniaturized probe using 2 axis MEMS scanner for endoscopic multiphoton excitation microscopy

The practical limitation of in vivo multiphoton excitation microscopy (MPM) is the lack of a compact and flexible probe. Most MPM depends on the bench-top microscope, which prohibits expansion of in

2-D MEMS scanner for handheld multispectral confocal microscopes

We describe a 2-D MEMS scanner for a handheld multispectral confocal microscope for early detection of cervical cancer. The MEMS scanner has an inner gimbal design with torsional springs separated

Optical MEMS for Lightwave Communication

The intensive investment in optical microelectromechanical systems (MEMS) in the last decade has led to many successful components that satisfy the requirements of lightwave communication networks.

Metasurface holograms for visible light

Holography, a revolutionary 3D imaging technique, has been developed for storing and recovering the amplitude and phase of light scattered by objects. Later, single-beam computer-generated phase

High‐Efficiency Dielectric Huygens’ Surfaces

Optical metasurfaces have developed as a breakthrough concept for advanced wave‐front engineering enabled by subwavelength resonant nanostructures. However, reflection and/or absorption losses as

Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces.

The concept of optical phase discontinuities is applied to the design and demonstration of aberration-free planar lenses and axicons, comprising a phased array of ultrathin subwavelength-spaced