Dynamic management of controls in semiconductor manufacturing

@article{Munga2011DynamicMO,
  title={Dynamic management of controls in semiconductor manufacturing},
  author={Justin Nduhura Munga and St{\'e}phane Dauz{\`e}re-P{\'e}r{\`e}s and Philippe Vialletelle and Claude Yugma},
  journal={2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference},
  year={2011},
  pages={1-6}
}
In order to optimize the number of controls in semiconductor manufacturing, a Permanent Index per Context (IPC) has been developed to evaluate in real-time the risk on production tools. Depending on the context which can be defined at tool level, chamber level or recipe level, the IPC allows a very large amount of data to be managed and helps to compute global risk indicators on production. A prototype based on the IPC has been developed and deployed for the CMP workshop. Results show that… CONTINUE READING
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