Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy

  title={Dual-wavelength digital holographic microscopy with sub-nanometer axial accuracy},
  author={J. Kuehn and F. Charri{\'e}re and T. Colomb and F. Montfort and E. Cuche and Y. Emery and P. Marquet and C. Depeursinge},
  booktitle={SPIE Photonics Europe},
  • J. Kuehn, F. Charriére, +5 authors C. Depeursinge
  • Published in SPIE Photonics Europe 2008
  • Engineering, Materials Science
  • We present dual-wavelength Digital Holographic Microscopy (DHM) measurements on a certified 8.9 nm high Chromium thin step sample and demonstrate sub-nanometer axial accuracy. We introduce a modified DHM Reference Calibrated Hologram (RCH) reconstruction algorithm taking into account amplitude contributions. By combining this with a temporal averaging procedure and a specific dual-wavelength DHM arrangement, it is shown that specimen topography can be measured with an accuracy, defined as the… CONTINUE READING


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