Dual-Axes Confocal Fluorescence Microscopy with a Two-Dimensional MEMS Scanner


This paper presents a dual-axes confocal fluorescence imaging system based on a two-dimensional (2-D) microelectromechanical systems (MEMS) scanner. The gimbaled scanner is fabricated on a double silicon-on-insulator (SOI) wafer and is actuated by self-aligned, vertical, electrostatic comb actuators. The device is aluminum coated by blanket evaporation to… (More)


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