Drive Amplitude Dependence of Micromechanical Resonator Series Motional Resistance

@inproceedings{CaoDriveAD,
  title={Drive Amplitude Dependence of Micromechanical Resonator Series Motional Resistance},
  author={Jun Cao}
}
Frequency measurements are utilized to show that the series motional resistance R x of a capacitive-comb transduced folded-beam micromechanical resonator depends strongly on drive amplitude when operated under vacuum. Subsequent measurements in air made via an electromechanical amplitude modulation (EAM) technique then contradict findings in vacuum, showing no R x drive-level dependence when the reso-nator is operated under atmospheric pressure. Based on these results, a mechanism is… CONTINUE READING
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