Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode

@inproceedings{Lapshin2015DriftinsensitiveDC,
  title={Drift-insensitive distributed calibration of probe microscope scanner in nanometer range: Real mode},
  author={R. Lapshin},
  year={2015}
}
A method is described intended for distributed calibration of a probe microscope scanner consisting in a search for a net of local calibration coefficients (LCCs) in the process of automatic measurement of a standard surface, whereby each point of the movement space of the scanner can be defined by a unique set of scale factors. Feature-oriented scanning (FOS) methodology is used to implement the distributed calibration, which permits to exclude in situ the negative influence of thermal drift… Expand